Another long-delayed response (you see, David, I am taking your advice to participate more):
The only two of those I've seen are The Prisoner (probably the best TV specfic ever) and some of The Immortal, which was, sad to say, just another fugitive (or Fugitive) series.
I no longer remember if I am repeating myself here, but other older shows of merit (to list those of little merit would be quite a task) include, alphabetically:
The Avengers: is this specficTV? I like the categroy name, coined by I know not whom, spy-fi: and this is it.
Captain Video: yes, a certain cheese quota (special-effects budget $25/week, literally)--but underneath, remarkably solid and curiously adult plotting, characterization, and scripting (not surprising considering the who's-who of sf writers who at various times worked on the show).
Doctor Who ["classic"]: what more can one say? Quintessential British dry humor disguised as action/adventure.
The Hitchhiker's Guide to the Galaxy: ditto above, save no disguise.
The Man from U.N.C.L.E.: more spy-fi. At its best, an American Dr. Who; at its less than best, either too serious or too far OTT.
Max Headroom: something that shouldn't have been anything but banal, but somehow caught lightning in a bottle; a strong cast and excellent production values (that is, mood, atmosphere) helped a lot.
Mystery Science Theater 3000: I choke up with laughter just thinking about it.
Night Gallery: spotty but often good.
The Outer Limits [original series]: probably cheesy by today's standards, but--perhaps, like Sapphire and Steel, aided by low production budgets--often highly atmospheric (dark) and exciting.
The Prisoner: repeated here for completeness.
Sapphire and Steel: ditto.
Science Fiction Theatre: variable, but often surprisignly good--frequently adaptions of semi-classic short stories.
The Twilight Zone: sometimes sloppy, but often remarkably moving.
Ultraman: Japanese high camp: uproarious (and clearly self-conscious, or as we say today "bi-modal").
The Wild Wild West: yet more spy-fi, with the added fillip of being set in the mythical "old west". The Man From U.N.C.L.E. in a cowboy hat.
Wizards and Warriors: superlative: what a shame CBS strangled it in its cradle.
Xena: I only saw a few bits and pieces here and there, but it looked pretty amusing.
Oh, and let's not forget the 1935 Gene Autry serial "The Phantom Empire": singing cowboy beats up on super-science soldiers in Roman togas on horseback who come up on elevators from an underground city. How can anyone improve on that?
Eric Walker, webmaster